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Proceedings Paper

Quantitative comparison of measurement methods for the evaluation of micro- and nanostructures written with 2PP
Author(s): Emely Marie Harnisch; Niels König; Robert Schmitt
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Paper Abstract

Two-Photon Polymerization (2PP) has become an established process for fabricating individual micro-and nanostructures nearly in the last two decades. Its high degree of freedom opened up novel possibilities for a large range of applications like functional structures for cell growth, photonic crystals, nanoantennas, diffractive optical elements and lab-on-a-chip structures (just to name a few). Since the measurement of structures written with 2PP is always very time consuming, we present a comparison between white light interferometry (WLI) and confocal microscopy (CM) which were used for measuring structures written with 2PP. By performing a GageRR analysis with both metrology devices, we calculated the process tolerance one has to accept when measuring these structures with WLI or CM.

Paper Details

Date Published: 21 April 2016
PDF: 10 pages
Proc. SPIE 9884, Nanophotonics VI, 98842Z (21 April 2016); doi: 10.1117/12.2227598
Show Author Affiliations
Emely Marie Harnisch, Fraunhofer Institute for Production Technology (Germany)
Niels König, Fraunhofer Institute for Production Technology (Germany)
Robert Schmitt, Fraunhofer Institute for Production Technology (Germany)
RWTH Aachen Univ. (Germany)


Published in SPIE Proceedings Vol. 9884:
Nanophotonics VI
David L. Andrews; Jean-Michel Nunzi; Andreas Ostendorf, Editor(s)

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