Share Email Print
cover

Proceedings Paper

Study on structural and optical properties of TiO2 ALD coated silicon nanostructures
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Structural and optical properties of TiO2 ALD coated silicon nanostructures were investigated. The morphology and chemical composition of TiO2 coated silicon nanopillars and porous silicon were studied by using methods of scanning electron microscopy (SEM) and energy dispersive X-ray spectroscopy (EDX). Optical characteristics were studied using measurements of reflectance and luminescence spectra. Detailed analysis of morphological features and photoluminescence mechanisms were provided. Peculiarities of reflectance spectra were discussed. It was shown the possible application of these structures as antireflectance coatings.

Paper Details

Date Published: 21 April 2016
PDF: 6 pages
Proc. SPIE 9884, Nanophotonics VI, 98842H (21 April 2016); doi: 10.1117/12.2227122
Show Author Affiliations
Mykola Pavlenko, Odessa National I.I. Mechnikov Univ. (Ukraine)
Adam Mickiewicz Univ. (Poland)
Valerii Myndrul, Odessa National I.I. Mechnikov Univ. (Ukraine)
Igor Iatsunskyi, Adam Mickiewicz Univ. (Poland)
Stefan Jurga, Adam Mickiewicz Univ. (Poland)
Valentyn Smyntyna, Odessa National I.I. Mechnikov Univ. (Ukraine)


Published in SPIE Proceedings Vol. 9884:
Nanophotonics VI
David L. Andrews; Jean-Michel Nunzi; Andreas Ostendorf, Editor(s)

© SPIE. Terms of Use
Back to Top