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Proceedings Paper

Microfabrication of channel electron multipliers
Author(s): G. William Tasker; Scott T. Bentley; Steven M. Shank; Robert J. Soave; Alan M. Then
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Paper Abstract

Channel electron multipliers are vacuum-electron devices for detection of charged particles and energetic photons. Several manufacturing technologies for microelectronics and microelectromechanical systems hold significant promise for the development of a new generation of silicon-based channel electron multipliers with greater capabilities and broader applications than conventional glass-based ones. This paper describes several approaches to microfabrication of such devices using surface and bulk micromachining techniques. Results are presented for fully micromachined channel electron multipliers with signal gains in the range of 102 - 106.

Paper Details

Date Published: 26 September 1995
PDF: 13 pages
Proc. SPIE 2640, Microlithography and Metrology in Micromachining, (26 September 1995); doi: 10.1117/12.222657
Show Author Affiliations
G. William Tasker, Galileo Electro-Optics Corp. (United States)
Scott T. Bentley, Galileo Electro-Optics Corp. (United States)
Steven M. Shank, Galileo Electro-Optics Corp. (United States)
Robert J. Soave, Galileo Electro-Optics Corp. (United States)
Alan M. Then, Galileo Electro-Optics Corp. (United States)

Published in SPIE Proceedings Vol. 2640:
Microlithography and Metrology in Micromachining
Michael T. Postek, Editor(s)

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