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Proceedings Paper

FIB 601 focused ion beam fabrication of micron-sized apertures for the NASA AXAF x-ray telescope prelaunch calibration
Author(s): Eugene Y. Tsiang; Edwin M. Kellogg; Don Porterfield
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Paper Abstract

Focused ion-beams have proved to be a superior means of fabricating holes between 5 and 20 microns in diameter, through gold and tungsten sheets over 40 microns thick. These holes are milled with an FEI FIB800 Focused Ion Beam Workstation using a Ga liquid metal source, with and without an enhancement gaseous etchant. They will be used as apertures for detectors that probe the point response function of the X-ray optics (Wolter Type-I mirror pairs), which form part of the NASA Advanced X-ray Astrophysical Facility. It is found that both pure milling and gas-assisted etching produced micron-sized holes of a quality superior to those produced by laser beam sputtering.

Paper Details

Date Published: 26 September 1995
PDF: 11 pages
Proc. SPIE 2640, Microlithography and Metrology in Micromachining, (26 September 1995); doi: 10.1117/12.222637
Show Author Affiliations
Eugene Y. Tsiang, Smithsonian Astrophysical Observatory (United States)
Edwin M. Kellogg, Smithsonian Astrophysical Observatory (United States)
Don Porterfield, Materials Analytical Services (United States)


Published in SPIE Proceedings Vol. 2640:
Microlithography and Metrology in Micromachining
Michael T. Postek, Editor(s)

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