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Proceedings Paper

Recent trends in silicon micromachining technology
Author(s): John H. Jerman
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Paper Abstract

The rapid expansion in number and scope of research projects in the general area of micromachining technology makes the field especially interesting. Advances, particularly from universities and research institutes, suggest that increased commercial development is likely in a number of new fields. The nature of the fabrication technologies used to make these prototype parts, however, lead to difficulties in quickly reaping commercial benefits from these technolgoical advancements. This is in contrast to the nature of commercial development in the integrated circuit industry, where standardized processes result in rapid development of systems and products which use new designs.

Paper Details

Date Published: 26 September 1995
PDF: 6 pages
Proc. SPIE 2640, Microlithography and Metrology in Micromachining, (26 September 1995); doi: 10.1117/12.222634
Show Author Affiliations
John H. Jerman, EG&G IC Sensors (United States)


Published in SPIE Proceedings Vol. 2640:
Microlithography and Metrology in Micromachining
Michael T. Postek, Editor(s)

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