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Proceedings Paper

Cost-effective and large-area process for the functionalization and surface microstructuring using photo-patternable TiO2 sol-gel process and colloidal photolithography
Author(s): L. Berthod; O. Shavdina; F. Vocanson; M. Langlet; O. Dellea; C. Veillas; S. Reynaud; I. Verrier; Y. Jourlin
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Paper Abstract

The authors demonstrate a low cost direct process to directly print TiO2 grating on both planar and non-conventional substrate such as cylinder components. A well collimated i-line source emitting at a 365nm wavelength illuminates a mono layer of 1μm diameter silica microspheres deposited on a photosensitive TiO2-based sol-gel layer. No etching process is required since this layer is directly UV photo patternable like a negative photo-resist. Furthermore this thin layer offers interesting optical properties (high refractive index) and good mechanical and chemical stability. The paper describes the photochemistry of the TiO2 sol-gel layer process, the modeling of the electric field distribution below the spheres during the illumination process and preliminary results of TiO2 nanopillars of 200 nm diameter.

Paper Details

Date Published: 27 April 2016
PDF: 8 pages
Proc. SPIE 9888, Micro-Optics 2016, 988805 (27 April 2016); doi: 10.1117/12.2225917
Show Author Affiliations
L. Berthod, Univ. Jean Monnet Saint-Etienne, CNRS (France)
Univ. Grenoble Alpes, CNRS (France)
O. Shavdina, Univ. Jean Monnet Saint-Etienne, CNRS (France)
Lab. for Energy Conversion Components (France)
Lab. for Innovation in New Energy Technologies and Nanomaterials (France)
F. Vocanson, Univ. Jean Monnet Saint-Etienne, CNRS (France)
M. Langlet, Univ. Grenoble Alpes, CNRS (France)
O. Dellea, Lab. for Energy Conversion Components (France)
Lab. for Innovation in New Energy Technologies and Nanomaterials (France)
C. Veillas, Univ. Jean Monnet Saint-Etienne, CNRS (France)
S. Reynaud, Univ. Jean Monnet Saint-Etienne, CNRS (France)
I. Verrier, Univ. Jean Monnet Saint-Etienne, CNRS (France)
Y. Jourlin, Univ. Jean Monnet Saint-Etienne, CNRS (France)


Published in SPIE Proceedings Vol. 9888:
Micro-Optics 2016
Hugo Thienpont; Jürgen Mohr; Hans Zappe; Hirochika Nakajima, Editor(s)

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