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Proceedings Paper

Simultaneous measurement of surface shape and optical thickness variation of transparent plate using wavelength tuning and polynomial window function
Author(s): Yangjin Kim; Naohiko Sugita; Mamoru Mitsuishi
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Proc. SPIE 9890, Optical Micro- and Nanometrology VI, ; doi: 10.1117/12.2225194
Show Author Affiliations
Yangjin Kim, The Univ. of Tokyo (Japan)
Naohiko Sugita, The Univ. of Tokyo (Japan)
Mamoru Mitsuishi, The Univ. of Tokyo (Japan)


Published in SPIE Proceedings Vol. 9890:
Optical Micro- and Nanometrology VI
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)

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