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Proceedings Paper

Responsivity improvements for a vanadium oxide microbolometer using subwavelength resonant absorbers
Author(s): Evan M. Smith; Janardan Nath; James Ginn; Robert E. Peale; David Shelton
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Paper Abstract

Subwavelength resonant structures designed for long-wave infrared (LWIR) absorption have been integrated with a standard vanadium-oxide microbolometer. Dispersion of the dielectric refractive index provides for multiple overlapping resonances that span the 8-12 μm LWIR wavelength band, a broader range than can be achieved using the usual quarter-wave resonant cavity engineered into the air-bridge structures. Experimental measurements show a 49% increase in responsivity for LWIR and a 71% increase across a full waveband as compared to a similar device designed for only LWIR absorption, using a 300°C blackbody at 35 Hz chopping rate. Increased thermal time constant due to additional mass is shown to lessen this enhancement at higher chopping rates.

Paper Details

Date Published: 20 May 2016
PDF: 7 pages
Proc. SPIE 9819, Infrared Technology and Applications XLII, 98191Q (20 May 2016); doi: 10.1117/12.2223954
Show Author Affiliations
Evan M. Smith, Univ. of Central Florida (United States)
Plasmonics, Inc. (United States)
Janardan Nath, Univ. of Central Florida (United States)
James Ginn, Plasmonics, Inc. (United States)
Robert E. Peale, Univ. of Central Florida (United States)
David Shelton, Plasmonics, Inc. (United States)


Published in SPIE Proceedings Vol. 9819:
Infrared Technology and Applications XLII
Bjørn F. Andresen; Gabor F. Fulop; Charles M. Hanson; Paul R. Norton, Editor(s)

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