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Proceedings Paper

A guide to properly select the defocusing distance for accurate solution of transport of intensity equation while testing aspheric surfaces
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Paper Abstract

In this paper, the Transport of Intensity Equation (TIE) for testing of an aspheric surface is verified experimentally. Using simulation, a proper defocus distance Δ𝑧 that leads to an accurate solution of TIE is estimated whenever the conic constant and configuration of the experiment are known. To verify this procedure a non-nulled experiment for testing an aspheric is used. For verification of the solution, the results are compared with the Shack-Hartmann sensor. The theoretical method and experimental results are compared to validate the results.

Paper Details

Date Published: 19 May 2016
PDF: 8 pages
Proc. SPIE 9868, Dimensional Optical Metrology and Inspection for Practical Applications V, 986804 (19 May 2016); doi: 10.1117/12.2223208
Show Author Affiliations
Peyman Soltani, Univ. of Zanjan (Iran, Islamic Republic of)
Ahmad Darudi, Univ. of Zanjan (Iran, Islamic Republic of)
Ali Reza Moradi, Univ. of Zanjan (Iran, Islamic Republic of)
Bilkent Univ. (Turkey)
Javad Amiri, Univ. of Maragheh (Iran, Islamic Republic of)
Georges Nehmetallah, The Catholic Univ. of America (United States)


Published in SPIE Proceedings Vol. 9868:
Dimensional Optical Metrology and Inspection for Practical Applications V
Kevin G. Harding; Song Zhang, Editor(s)

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