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Proceedings Paper

Spectroscopic imaging of buried layers in 2+1D via tabletop ptychography with high-harmonic EUV illumination
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Paper Abstract

We use EUV coherent microscopy to obtain high-resolution images of buried interfaces, with chemical specificity, in 2+1 dimensions. We perform reflection mode, ptychographic, coherent diffractive imaging with tabletop EUV light, at 29nm, produced by high harmonic generation. Our damascene-style samples consist of copper structures inlaid in SiO2, polished nearly flat with chemical mechanical polishing. We obtain images of both an unaltered damascene as well as one buried below a 100nm thick layer of evaporated aluminum. The aluminum is opaque to visible light and thick enough that neither optical microscopy, SEM, nor AFM can access the buried interface. EUV microscopy is able to image the buried structures, non-destructively, in conditions where other techniques cannot.

Paper Details

Date Published: 21 April 2016
PDF: 6 pages
Proc. SPIE 9778, Metrology, Inspection, and Process Control for Microlithography XXX, 97780J (21 April 2016); doi: 10.1117/12.2220368
Show Author Affiliations
Dennis F. Gardner, Univ. of Colorado at Boulder (United States)
Christina L. Porter, Univ. of Colorado at Boulder (United States)
Elisabeth R. Shanblatt, Univ. of Colorado at Boulder (United States)
Giulia F. Mancini, Univ. of Colorado at Boulder (United States)
Robert Karl, Univ. of Colorado at Boulder (United States)
Michael Tanksalvala, Univ. of Colorado at Boulder (United States)
Charles Bevis, Univ. of Colorado at Boulder (United States)
Henry C. Kapteyn, Univ. of Colorado at Boulder (United States)
Margaret M. Murnane, Univ. of Colorado at Boulder (United States)
Daniel E. Adams, Univ. of Colorado at Boulder (United States)


Published in SPIE Proceedings Vol. 9778:
Metrology, Inspection, and Process Control for Microlithography XXX
Martha I. Sanchez, Editor(s)

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