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Proceedings Paper

Advanced DFM application for automated bit-line pattern dummy
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Paper Abstract

This paper presents an automated DFM solution to generate Bit Line Pattern Dummy (BLPD) for memory devices. Dummy shapes are aligned with memory functional bits to ensure uniform and reliable memory device. This paper will present a smarter approach that uses an analysis based technique for adding the dummy shapes that have different types according to the space available. Experimental results based on layout of Mobile dynamic random access memory (DRAM).

Paper Details

Date Published: 16 March 2016
PDF: 6 pages
Proc. SPIE 9781, Design-Process-Technology Co-optimization for Manufacturability X, 978114 (16 March 2016); doi: 10.1117/12.2220276
Show Author Affiliations
Tae Hyun Shin, SK Hynix, Inc. (Korea, Republic of)
Cheolkyun Kim, SK Hynix, Inc. (Korea, Republic of)
Hyunjo Yang, SK Hynix, Inc. (Korea, Republic of)
Mohamed Bahr, Mentor Graphics Egypt (Egypt)


Published in SPIE Proceedings Vol. 9781:
Design-Process-Technology Co-optimization for Manufacturability X
Luigi Capodieci, Editor(s)

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