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Proceedings Paper

Neon reduction program on Cymer ArF light sources
Author(s): Dinesh Kanawade; Yzzer Roman; Ted Cacouris; Josh Thornes; Kevin O'Brien
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Paper Abstract

In response to significant neon supply constraints, Cymer has responded with a multi-part plan to support its customers. Cymer’s primary objective is to ensure that reliable system performance is maintained while minimizing gas consumption. Gas algorithms were optimized to ensure stable performance across all operating conditions.

The Cymer neon support plan contains four elements: 1. Gas reduction program to reduce neon by >50% while maintaining existing performance levels and availability; 2. short-term containment solutions for immediate relief. 3. qualification of additional gas suppliers; and 4. long-term recycling/reclaim opportunity. The Cymer neon reduction program has shown excellent results as demonstrated through the comparison on standard gas use versus the new >50% reduced neon performance for ArF immersion light sources. Testing included stressful conditions such as repetition rate, duty cycle and energy target changes. No performance degradation has been observed over typical gas lives.

Paper Details

Date Published: 15 March 2016
PDF: 6 pages
Proc. SPIE 9780, Optical Microlithography XXIX, 97801H (15 March 2016); doi: 10.1117/12.2219942
Show Author Affiliations
Dinesh Kanawade, Cymer LLC (United States)
Yzzer Roman, Cymer LLC (United States)
Ted Cacouris, Cymer LLC (United States)
Josh Thornes, Cymer LLC (United States)
Kevin O'Brien, Cymer LLC (United States)

Published in SPIE Proceedings Vol. 9780:
Optical Microlithography XXIX
Andreas Erdmann; Jongwook Kye, Editor(s)

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