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Proceedings Paper

Method for fast computation of angular light scattering spectra from 2D periodic arrays
Author(s): Jan Pomplun; Sven Burger; Lin Zschiedrich; Philipp Gutsche; Frank Schmidt
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Paper Abstract

An efficient numerical method for computing angle-resolved light scattering off periodic arrays is presented. The method combines finite-element discretization with a Schur complement solver. A significant speed-up of the computations in comparison to standard finite-element method computations is observed.

Paper Details

Date Published: 8 March 2016
PDF: 7 pages
Proc. SPIE 9778, Metrology, Inspection, and Process Control for Microlithography XXX, 977839 (8 March 2016); doi: 10.1117/12.2219666
Show Author Affiliations
Jan Pomplun, JCMwave GmbH (Germany)
Sven Burger, JCMwave GmbH (Germany)
Zuse Institute Berlin (Germany)
Lin Zschiedrich, JCMwave GmbH (Germany)
Philipp Gutsche, JCMwave GmbH (Germany)
Zuse Institute Berlin (Germany)
Frank Schmidt, JCMwave GmbH (Germany)
Zuse Institute Berlin (Germany)


Published in SPIE Proceedings Vol. 9778:
Metrology, Inspection, and Process Control for Microlithography XXX
Martha I. Sanchez, Editor(s)

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