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Proceedings Paper

Defect annihilation in DSA: Systematic study of optimal materials selection and processing conditions
Author(s): Su-Mi Hur; Gurdaman Khaira; Paulina A. Rincon-Delgadillo; Paul F. Nealey; Juan J. de Pablo
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Paper Details

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Proc. SPIE 9777, Alternative Lithographic Technologies VIII, 97770H; doi: 10.1117/12.2219447
Show Author Affiliations
Su-Mi Hur, Chonnam National Univ. (Korea, Republic of)
Gurdaman Khaira, The Univ. of Chicago (United States)
Paulina A. Rincon-Delgadillo, The Univ. of Chicago (United States)
Paul F. Nealey, The Univ. of Chicago (United States)
Juan J. de Pablo, The Univ. of Chicago (United States)


Published in SPIE Proceedings Vol. 9777:
Alternative Lithographic Technologies VIII
Christopher Bencher, Editor(s)

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