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Proceedings Paper

Filtration on block copolymer solution used in directed self assembly lithography
Author(s): Toru Umeda; Tomoyuki Takakura; Shuichi Tsuzuki
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Paper Abstract

In this paper, we presented the filtration effects on block copolymers (BCP) that are commonly used in directed self-assembly lithographic (DSAL) imaging schemes. Specifically we focused on filtration effects on micro-contaminants such as metal ions and metal induced gels.

Gel removal efficiency studies carried out with HDPE, Nylon and PTFE filters pointed out that Nylon 6,6 membrane is the most effective in removing gels in block copolymer (BCP) solutions.

Metal removal efficiency studies were conducted using multistep filtrations such as repetitive filtration of single membrane material and combination of different type of membranes. Results showed that a combination of Nylon-6,6 and ion-exchange filters is highly effective in reducing metals such as Li, Mg and Al to > 99.99% efficiency. The mechanism of metal removal efficiency is discussed in detail.

Paper Details

Date Published: 25 March 2016
PDF: 8 pages
Proc. SPIE 9779, Advances in Patterning Materials and Processes XXXIII, 977921 (25 March 2016); doi: 10.1117/12.2219423
Show Author Affiliations
Toru Umeda, Nihon Pall Ltd. (Japan)
Tomoyuki Takakura, Nihon Pall Ltd. (Japan)
Shuichi Tsuzuki, Nihon Pall Ltd. (Japan)

Published in SPIE Proceedings Vol. 9779:
Advances in Patterning Materials and Processes XXXIII
Christoph K. Hohle; Rick Uchida, Editor(s)

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