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Proceedings Paper

The effects of surface topography of nanopatterned substrates on the directed self-assembly of block copolymers
Author(s): Grant P. Garner; Juan J. de Pablo; Roel Gronheid; Paul F. Nealey
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Paper Details

Date Published:
Proc. SPIE 9777, Alternative Lithographic Technologies VIII, 97771Y; doi: 10.1117/12.2219388
Show Author Affiliations
Grant P. Garner, The Univ. of Chicago (United States)
Juan J. de Pablo, The Univ. of Chicago (United States)
Roel Gronheid, IMEC (Belgium)
Paul F. Nealey, The Univ. of Chicago (United States)

Published in SPIE Proceedings Vol. 9777:
Alternative Lithographic Technologies VIII
Christopher Bencher, Editor(s)

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