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Proceedings Paper

A route for industry compatible directed self-assembly of high-chi PS-PDMS block copolymers
Author(s): S. Böhme; C. Girardot; J. Garnier; J. Arias-Zapata; S. Arnaud; R. Tiron; O. Marconot; D. Buttard; M. Zelsmann
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Paper Abstract

In this work, we present completely industry adapted processes for high-chi PS-PDMS block copolymers. DSA was performed on trenches fabricated within standard photolithography stacks and pattern transfer was made by using etching processes similar to those used for gate etching in industry. We propose the alignment of two different PS-PDMS (45.5kg/mol, 16kg/mol) solely by thermal annealing. By adding plasticizer molecules in the high molecular weight BCP (45.5k), we have not only avoided solvent vapor annealing but also reduced significantly the processing time. The properties of the guiding lines and the quality of the final BCP hard mask (CD uniformity, LWR, LER) were investigated.

Paper Details

Date Published: 1 April 2016
PDF: 10 pages
Proc. SPIE 9777, Alternative Lithographic Technologies VIII, 97771W (1 April 2016); doi: 10.1117/12.2219312
Show Author Affiliations
S. Böhme, Univ. Grenoble Alpes (France)
LTM, CNRS (France)
CEA-LETI, MINATEC (France)
C. Girardot, Univ. Grenoble Alpes (France)
LTM, CNRS (France)
CEA-LETI, MINATEC (France)
J. Garnier, Univ. Grenoble Alpes (France)
LTM, CNRS (France)
CEA-LETI, MINATEC (France)
J. Arias-Zapata, Univ. Grenoble Alpes (France)
LTM, CNRS (France)
CEA-LETI, MINATEC (France)
S. Arnaud, Univ. Grenoble Alpes (France)
LTM, CNRS (France)
CEA-LETI, MINATEC (France)
R. Tiron, Univ. Grenoble Alpes (France)
CEA-LETI, MINATEC (France)
O. Marconot, Univ. Grenoble Alpes (France)
CEA INAC (France)
D. Buttard, Univ. Grenoble Alpes (France)
CEA INAC (France)
M. Zelsmann, Univ. Grenoble Alpes (France)
LTM, CNRS (France)
CEA-LETI, MINATEC (France)


Published in SPIE Proceedings Vol. 9777:
Alternative Lithographic Technologies VIII
Christopher Bencher, Editor(s)

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