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Proceedings Paper

Modeling and parameter tuning for templated directed self-assembly
Author(s): B. Meliorisz; T. Mülders; H.-J. Stock; S. Marokkey; W. Demmerle; K. Lai; A. Raghunathan; P. Dhagat
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Paper Abstract

In this paper, we study the impact of topographic guide or template properties on pattern formation in a directed self-assembly (DSA) process. In particular, we investigate the relationship between free energy and defect generation or process robustness, and analyze the influence of guide affinity. The good correlation between experimental and simulation results confirms the role of certain setup parameters and process conditions on the DSA patterning.

Paper Details

Date Published: 22 March 2016
PDF: 7 pages
Proc. SPIE 9777, Alternative Lithographic Technologies VIII, 97770Z (22 March 2016); doi: 10.1117/12.2219158
Show Author Affiliations
B. Meliorisz, Synopsys GmbH (Germany)
T. Mülders, Synopsys GmbH (Germany)
H.-J. Stock, Synopsys GmbH (Germany)
S. Marokkey, Synopsys GmbH (Germany)
W. Demmerle, Synopsys GmbH (Germany)
K. Lai, IBM, T. J. Watson Research Ctr. (United States)
A. Raghunathan, GLOBALFOUNDRIES, Inc. (United States)
P. Dhagat, GLOBALFOUNDRIES, Inc. (United States)

Published in SPIE Proceedings Vol. 9777:
Alternative Lithographic Technologies VIII
Christopher Bencher, Editor(s)

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