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Proceedings Paper

Modeling of initial interaction between the laser pulse and Sn droplet target and pre-plasma formation for the LPP EUV source
Author(s): Akira Sasaki; Katsunobu Nishihara; Atushi Sunahara; Hiroyuki Furukawa; Takeshi Nishikawa
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Paper Abstract

We develop a new simulation code for the optimization of efficiency of the laser pumped plasma (LPP) extreme ultra violet (EUV) light source, which is applicable to the pre-plasma formation from a tin droplet target irradiated by a pre-pulse laser. We investigate algorithms of reorganization of the mesh for the Lagrangian hydrodynamics simulation. We also investigate the model of the liquid to gas phase transition to calculate the dynamics of particle formation through the laser ablation.

Paper Details

Date Published: 18 March 2016
PDF: 6 pages
Proc. SPIE 9776, Extreme Ultraviolet (EUV) Lithography VII, 97762C (18 March 2016); doi: 10.1117/12.2219045
Show Author Affiliations
Akira Sasaki, Japan Atomic Energy Agency (Japan)
Katsunobu Nishihara, Osaka Univ. (Japan)
Atushi Sunahara, Institute for Laser Technology (Japan)
Hiroyuki Furukawa, Institute for Laser Technology (Japan)
Takeshi Nishikawa, Okayama Univ. (Japan)

Published in SPIE Proceedings Vol. 9776:
Extreme Ultraviolet (EUV) Lithography VII
Eric M. Panning, Editor(s)

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