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Proceedings Paper

Simultaneous AFM nano-patterning and imaging for photomask repair
Author(s): Aliasghar Keyvani; Mehmet S. Tamer; Maarten H. van Es; Hamed Sadeghian
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Paper Abstract

In this paper we present a new AFM based nano-patterning technique that can be used for fast defect repairing of high resolution photomasks and possibly other high-speed nano-patterning applications. The proposed method works based on hammering the sample with tapping mode AFM followed by wet cleaning of the residuals. On the area where a specific pattern should be written, the tip-sample interaction force is tuned in a controlled manner by changing the excitation frequency of the cantilever without interrupting the imaging process. Using this method several patterns where transferred to different samples with imaging speed. While the pattern was transferred to the sample in each tracing scan line, the patterned sample was imaged in retracing scan line, thus the outcome was immediately visible during the experiment.

Paper Details

Date Published: 8 March 2016
PDF: 7 pages
Proc. SPIE 9778, Metrology, Inspection, and Process Control for Microlithography XXX, 977818 (8 March 2016); doi: 10.1117/12.2219041
Show Author Affiliations
Aliasghar Keyvani, TNO (Netherlands)
Delft Univ. of Technology (Netherlands)
Mehmet S. Tamer, TNO (Netherlands)
Delft Univ. of Technology (Netherlands)
Maarten H. van Es, TNO (Netherlands)
Hamed Sadeghian, TNO (Netherlands)

Published in SPIE Proceedings Vol. 9778:
Metrology, Inspection, and Process Control for Microlithography XXX
Martha I. Sanchez, Editor(s)

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