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Proceedings Paper

Development of heat resistant polyphenol compounds applied to the spin-on carbon hardmask
Author(s): Takashi Makinoshima; Takashi Satou; Junya Horiuchi; Kana Okada; Yoko Shimizu; Masatoshi Echigo
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Paper Abstract

In this paper, we report the development of a new polyphenol, NF7177, applied to the Spin-On Carbon Hardmask and the thermosetting properties. The new polyphenol derivatives were easily synthesized by the condensation of aldehydes and dihydroxybiphenyl compounds. We found new polyphenol NF7177 was showed the good applicability to the raw material for the Spin-On Carbon Hardmask [1]. It was indicated that the heat resistance of NF7177 was due to cross-linking based on dehydration reaction. Furthermore the thermosetting properties seem to be depend on the number and position of OH group.

Paper Details

Date Published: 21 March 2016
PDF: 9 pages
Proc. SPIE 9779, Advances in Patterning Materials and Processes XXXIII, 97791K (21 March 2016); doi: 10.1117/12.2218946
Show Author Affiliations
Takashi Makinoshima, Mitsubishi Gas Chemical Co., Inc. (Japan)
Takashi Satou, Mitsubishi Gas Chemical Co., Inc. (Japan)
Junya Horiuchi, Mitsubishi Gas Chemical Co., Inc. (Japan)
Kana Okada, Mitsubishi Gas Chemical Co., Inc. (Japan)
Yoko Shimizu, Mitsubishi Gas Chemical Co., Inc. (Japan)
Masatoshi Echigo, Mitsubishi Gas Chemical Co., Inc. (Japan)


Published in SPIE Proceedings Vol. 9779:
Advances in Patterning Materials and Processes XXXIII
Christoph K. Hohle; Rick Uchida, Editor(s)

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