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Proceedings Paper

Shape optimization for DSA
Author(s): Gaddiel Ouaknin; Nabil Laachi; Kris Delaney; Glenn Fredrickson; Frederic Gibou
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Paper Abstract

Directed self-assembly using block copolymers for positioning vertical interconnect access in integrated circuits relies on the proper shape of a confined domain in which polymers will self-assemble into the targeted design. Finding that shape, i.e., solving the inverse problem, is currently mainly based on trial and error approaches. We introduce a level-set based algorithm that makes use of a shape optimization strategy coupled with self-consistent field theory to solve the inverse problem in an automated way. It is shown that optimal shapes are found for different targeted topologies with accurate placement and distances between the different components.

Paper Details

Date Published: 22 March 2016
PDF: 11 pages
Proc. SPIE 9777, Alternative Lithographic Technologies VIII, 97770Y (22 March 2016); doi: 10.1117/12.2218515
Show Author Affiliations
Gaddiel Ouaknin, Univ. of California, Santa Barbara (United States)
Nabil Laachi, Univ. of California, Santa Barbara (United States)
Kris Delaney, Univ. of California, Santa Barbara (United States)
Glenn Fredrickson, Univ. of California, Santa Barbara (United States)
Frederic Gibou, Univ. of California, Santa Barbara (United States)

Published in SPIE Proceedings Vol. 9777:
Alternative Lithographic Technologies VIII
Christopher Bencher, Editor(s)

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