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Proceedings Paper

The simulation of workpieces' surface in polishing
Author(s): Lunzhe Wu; Xueke Xu; Minghong Yang; Chaoyang Wei; Shijie Liu; Jianda Shao
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Paper Abstract

Dynamic Mechanical Analysis (DMA) and Bending Beam Rheometer (BBR) are applied to detect the property of the polishing pitch and get the creep compliance combining the craftwork of polishing. The simulation of workpieces’ surface in polishing is completed based on the Preston formula, Boltzmann superposition principle and Boltzmann superposition principle. A V-curve is gotten on studying the PV’s time history of the polished workpiece. Meanwhile, a confirmatory experiment whose parameter is agree with the simulation is completed, which the optimum result of PV, 0.3λ (λ=623.8nm) is similar with the optimum result of PV by simulation, 0.27 λ. A resemble simulated surface is gotten on the same PV with the experiment.

Paper Details

Date Published: 12 October 2015
PDF: 7 pages
Proc. SPIE 9633, Optifab 2015, 96332P (12 October 2015); doi: 10.1117/12.2218456
Show Author Affiliations
Lunzhe Wu, Shanghai Univ. (China)
Xueke Xu, Shanghai Institute of Optics and Fine Mechanics (China)
Minghong Yang, Shanghai Institute of Optics and Fine Mechanics (China)
Chaoyang Wei, Shanghai Institute of Optics and Fine Mechanics (China)
Shijie Liu, Shanghai Institute of Optics and Fine Mechanics (China)
Jianda Shao, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 9633:
Optifab 2015
Julie L. Bentley; Sebastian Stoebenau, Editor(s)

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