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Proceedings Paper

NEMS-based MIM plasmonics tunable filter
Author(s): Kareem Khirallah; Mohamed A. Swillam
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Paper Abstract

Designing a miniaturized and efficient optical filter which can be actively tuned is a modern engineering challenge. This paper propose a design of a device with a nano scale size for active tuning the resonance frequency of a metal-insulator-metal plasmonics optical filter. The design is based on controlling the relative position between two stubs in metal-Insulator-metal plasmonics waveguide using NEMS technology. The mechanical design parameter is chosen carefully to be compatible with modern fabrication technology and a reasonable fabrication process of the device is proposed. The analysis of the mechanical and optical design is done and shows a promising performance. For the chosen mechanical design parameters, the optical resonance wavelength can be tuned from 1.45μm to 1.65μm using 7VDC actuation voltage.

Paper Details

Date Published: 15 March 2016
PDF: 9 pages
Proc. SPIE 9760, MOEMS and Miniaturized Systems XV, 97600V (15 March 2016); doi: 10.1117/12.2218432
Show Author Affiliations
Kareem Khirallah, Boston Univ. (United States)
Mohamed A. Swillam, The American Univ. in Cairo (Egypt)

Published in SPIE Proceedings Vol. 9760:
MOEMS and Miniaturized Systems XV
Wibool Piyawattanametha; Yong-Hwa Park, Editor(s)

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