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Proceedings Paper

Nanopore integrated with Au clusters formed under electron beam irradiation for single molecule analysis
Author(s): Seong Soo Choi; Myoung Jin Park; Chul Hee Han; Sung In Kim; Jung Ho Yoo; Kyung Jin Park; Nam Kyou Park; Yong-Sang Kim
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Paper Abstract

Recently the single molecules such as protein and deoxyribonucleic acid (DNA) have been successfully characterized using a solidstate nanopore with an electrical detection technique. However, the optical plasmonic nanopore has yet to be fabricated. The optical detection technique can be better utilized as next generation ultrafast geneome sequencing devices due to the possible utilization of the current optical technique for genome sequencing. In this report, we have investigated the Au nanopore formation under the electron beam irradiation on an Au aperture. The circular-type nanoopening with ~ 5 nm diameter on the diffused membrane is fabricated by using 2 keV electron beam irradiation by using field emission scanning electron microscopy (FESEM). We found the Au cluster on the periphery of the drilled aperture under a 2 keV electron beam irradiation. Immediately right after electron beam irradiation, no Au cluster and no Au crystal lattice structure on the diffused plane are observed. However, after the sample was kept for ~ 6 months under a room environment, the Au clusters are found on the diffused membrane and the Au crystal lattice structures on the diffused membrane are also found using high resolution transmission electron microscopy. These phenomena can be attributed to Ostwald ripening. In addition, the Au nano-hole on the 40 nm thick Au membrane was also drilled by using 200 keV scanning transmission electron microscopy.

Paper Details

Date Published: 1 March 2016
PDF: 8 pages
Proc. SPIE 9714, Single Molecule Spectroscopy and Superresolution Imaging IX, 97140I (1 March 2016); doi: 10.1117/12.2218269
Show Author Affiliations
Seong Soo Choi, SunMoon Univ. (Korea, Republic of)
Myoung Jin Park, SunMoon Univ. (Korea, Republic of)
Chul Hee Han, SunMoon Univ. (Korea, Republic of)
Sung In Kim, National Nanofabrication Ctr. (Korea, Republic of)
Jung Ho Yoo, National Nanofabrication Ctr. (Korea, Republic of)
Kyung Jin Park, National Nanofabrication Ctr. (Korea, Republic of)
Nam Kyou Park, Seoul National Univ. (Korea, Republic of)
Yong-Sang Kim, SungKyunKwan Univ. (Korea, Republic of)

Published in SPIE Proceedings Vol. 9714:
Single Molecule Spectroscopy and Superresolution Imaging IX
Jörg Enderlein; Ingo Gregor; Zygmunt Karol Gryczynski; Rainer Erdmann; Felix Koberling, Editor(s)

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