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Proceedings Paper

Wavefront aberrations control for complex optical systems by compensation-surface
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Paper Abstract

Figure-errors as an optical manufacture error would degrade the performance of optical system. Optical components-clocking around optical axis is a classical method of figure-errors compensation. However, the compensation ability of optical component clocking is limited by the distribution of actual figure-error. This paper proposes a compensation-surface method, which is a simple and effective method for figure-error compensation. Based on the predicted wavefront error with actual figure error, an analytical computational method of figure function of the compensation-surface is built. The figure of compensation-surface is a deterministic polished surface. Finally the other figure errors can be largely compensated by the compensation-surface. The method is implemented on a manufactured optical system, a 193nm small-field projection lens. Simulation experiment proves our method can greatly reduce the aberration caused by figure errors. The WFE can be reduced to 0.04λ (λ=193.29nm) from 0.265λ and reduced by 84%. The compensation effect is more remarkable, and nearly 2.7 times the compensation effect of optical-component clocking method.

Paper Details

Date Published: 5 November 2015
PDF: 7 pages
Proc. SPIE 9795, Selected Papers of the Photoelectronic Technology Committee Conferences held June–July 2015, 97952L (5 November 2015); doi: 10.1117/12.2218151
Show Author Affiliations
Xiaolin Liu, Beijing Institute of Technology (China)
Yanqiu Li, Beijing Institute of Technology (China)
Ke Liu, Beijing Institute of Technology (China)

Published in SPIE Proceedings Vol. 9795:
Selected Papers of the Photoelectronic Technology Committee Conferences held June–July 2015
Shenggang Liu; Songlin Zhuang; Michael I. Petelin; Libin Xiang, Editor(s)

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