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Proceedings Paper

Nanoimprint lithography using disposable biomass template
Author(s): Makoto Hanabata; Satoshi Takei; Kigen Sugahara; Shinya Nakajima; Naoto Sugino; Takao Kameda; Jiro Fukushima; Yoko Matsumoto; Atsushi Sekiguchi
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Paper Abstract

A novel nanoimprint lithography process using disposable biomass template having gas permeability was investigated. It was found that a disposable biomass template derived from cellulose materials shows an excellent gas permeability and decreases transcriptional defects in conventional templates such as quartz, PMDS, DLC that have no gas permeability. We believe that outgasses from imprinted materials are easily removed through the template. The approach to use a cellulose for template material is suitable as the next generation of clean separation technology. It is expected to be one of the defect-less thermal nanoimprint lithographic technologies. It is also expected that volatile materials and solvent including materials become available that often create defects and peelings in conventional temples that have no gas permeability.

Paper Details

Date Published: 1 April 2016
PDF: 6 pages
Proc. SPIE 9777, Alternative Lithographic Technologies VIII, 97771G (1 April 2016); doi: 10.1117/12.2217483
Show Author Affiliations
Makoto Hanabata, Toyama Prefectural Univ. (Japan)
Satoshi Takei, Toyama Prefectural Univ. (Japan)
Kigen Sugahara, Toyama Prefectural Univ. (Japan)
Shinya Nakajima, Toyama Prefectural Univ. (Japan)
Naoto Sugino, Sanko Gosei Japan (Japan)
Takao Kameda, Sanko Gosei Japan (Japan)
Jiro Fukushima, Toyama Prefectural Plastic Industry Association (Japan)
Yoko Matsumoto, Litho Tech Japan Co., Ltd. (Japan)
Atsushi Sekiguchi, Litho Tech Japan Co., Ltd. (Japan)

Published in SPIE Proceedings Vol. 9777:
Alternative Lithographic Technologies VIII
Christopher Bencher, Editor(s)

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