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Proceedings Paper

3D profile measurement of micro-structured array with light field microscope
Author(s): Yao Hu; Haibo Gao; Shizhu Yuan; Rui Shi
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Paper Abstract

Micro-structured array is a crucial optical element with wide range of applications. The optical performance of microstructured array is determined by feature sizes of array, such as diameter, depth and the uniformity across the whole array. Those sizes can be directed retrieved from the 3D profile. We propose a 3D profile measurement system based on light field microscope, which is promising in achieving fast data acquisition by one shot. We propose the principle of measurement, develop the algorithm for focus stack calculation and 3D reconstruction. Preliminary experiments suggest the prospects and challenges.

Paper Details

Date Published: 5 November 2015
PDF: 4 pages
Proc. SPIE 9795, Selected Papers of the Photoelectronic Technology Committee Conferences held June–July 2015, 979523 (5 November 2015); doi: 10.1117/12.2216738
Show Author Affiliations
Yao Hu, Beijing Institute of Technology (China)
Haibo Gao, Beijing Institute of Technology (China)
Shizhu Yuan, Beijing Institute of Technology (China)
Rui Shi, Beijing Institute of Technology (China)


Published in SPIE Proceedings Vol. 9795:
Selected Papers of the Photoelectronic Technology Committee Conferences held June–July 2015
Shenggang Liu; Songlin Zhuang; Michael I. Petelin; Libin Xiang, Editor(s)

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