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Proceedings Paper

Synthesis and measurement of Os-Si multilayer mirrors optimized for the wavelength 380 Å
Author(s): Igor V. Kozhevnikov; L. L. Balakireva; Anatoli I. Fedorenko; I. A. Kopealets; Vladimir E. Levashov; A. N. Stetsenko; I. I. Struk; Alexander V. Vinogradov
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Paper Abstract

Flat and spherical Os - Si multilayer mirrors were synthesized and studied. Measured normal incidence reflectivity was 20% at the wavelength lambda equals 380 angstrom. The effect of impurities in silicon layers on the multilayer reflectivity in the ultrasoft x-ray region is discussed.

Paper Details

Date Published: 25 September 1995
PDF: 5 pages
Proc. SPIE 2520, Soft X-Ray Lasers and Applications, (25 September 1995); doi: 10.1117/12.221637
Show Author Affiliations
Igor V. Kozhevnikov, P.N. Lebedev Physical Institute (Russia)
L. L. Balakireva, P.N. Lebedev Physical Institute (Russia)
Anatoli I. Fedorenko, Kharkov Polytechnic Univ. (Ukraine)
I. A. Kopealets, Kharkov Polytechnic Univ. (Ukraine)
Vladimir E. Levashov, P.N. Lebedev Physical Institute (Russia)
A. N. Stetsenko, Kharkov Polytechnic Univ. (Ukraine)
I. I. Struk, P.N. Lebedev Physical Institute (Russia)
Alexander V. Vinogradov, P.N. Lebedev Physical Institute (Russia)


Published in SPIE Proceedings Vol. 2520:
Soft X-Ray Lasers and Applications
Jorge J. G. Rocca; Peter L. Hagelstein, Editor(s)

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