Share Email Print
cover

Proceedings Paper

Stacking of polymer nano-gratings by electron beam writing to form 3-level diffractive optical elements for 3D holographic lithography
Author(s): Leon Yuan; Peter R. Herman
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Details

Date Published:
PDF
Proc. SPIE 9759, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX, 97590K; doi: 10.1117/12.2216277
Show Author Affiliations
Leon Yuan, Univ. of Toronto (Canada)
Peter R. Herman, Univ. of Toronto (Canada)


Published in SPIE Proceedings Vol. 9759:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX
Georg von Freymann; Winston V. Schoenfeld; Raymond C. Rumpf, Editor(s)

© SPIE. Terms of Use
Back to Top