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Proceedings Paper

Thermal field emission sources and optics for Gaussian electron-beam lithography
Author(s): Tom Chisholm; Bernard A. Wallman; Johannes C. Romijn
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Paper Abstract

The use of Schottky emitters has enabled the designers of Gaussian vector-scan e-beam lithography equipment to meet the ever more stringent demands of the semiconductor industry. Although these emitters are expensive, their long life means that they are economical in total cost. Measurements of the influence of noise on the drives to each element of the Leica EBPG- 5FE column show that the only critical parts are the beam alignment units. Stable, low-noise drivers allow the beam positional noise to be within acceptable limits. A numerical technique has been developed to compute the total spot-size in the presence of spherical and chromatic aberrations and this allows the efficiency of the automatic spot optimization routines of the EBPG-5FE to be examined. The present emitter in the EBPG-5FE in DIMES has been in operation since August 1993 and stable and reproducible performance is obtained. The machine is in constant use for a wide range of tasks.

Paper Details

Date Published: 25 September 1995
PDF: 12 pages
Proc. SPIE 2522, Electron-Beam Sources and Charged-Particle Optics, (25 September 1995); doi: 10.1117/12.221595
Show Author Affiliations
Tom Chisholm, Leica Cambridge Ltd. (United Kingdom)
Bernard A. Wallman, Leica Cambridge Ltd. (United Kingdom)
Johannes C. Romijn, Delft Univ. of Technology (Netherlands)

Published in SPIE Proceedings Vol. 2522:
Electron-Beam Sources and Charged-Particle Optics
Eric Munro; Henry P. Freund, Editor(s)

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