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Proceedings Paper

Stochastic interactions in particle-projection systems: comparison of theory and Monte Carlo simulations
Author(s): Masis M. Mkrtchyan; Steven D. Berger; James Alexander Liddle; Lloyd R. Harriott
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Paper Abstract

Image blurring as a result of stochastic particle-particle interactions has been investigated for a particle projection system. A comparative analysis of the currently available analytical theories is presented. The results from these theories are also compared with Monte Carlo simulation results. Large variations in results and serious disagreements between the different theoretical approaches are found. The origin of the discrepancies arising from the earlier theories are understood and explained on the basis of our recently developed theory with two key concepts: consideration of nearest-neighbor interactions only, and a randomization length, over which the interactions are correlated.

Paper Details

Date Published: 25 September 1995
PDF: 12 pages
Proc. SPIE 2522, Electron-Beam Sources and Charged-Particle Optics, (25 September 1995); doi: 10.1117/12.221594
Show Author Affiliations
Masis M. Mkrtchyan, AT&T Bell Labs. (United States)
Steven D. Berger, AT&T Bell Labs. (United States)
James Alexander Liddle, AT&T Bell Labs. (United States)
Lloyd R. Harriott, AT&T Bell Labs. (United States)


Published in SPIE Proceedings Vol. 2522:
Electron-Beam Sources and Charged-Particle Optics
Eric Munro; Henry P. Freund, Editor(s)

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