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Proceedings Paper

Compact wavelength dispersive x-ray spectrometer for light elements in high-energy ion microprobe system
Author(s): Yukito Furukawa; Kazushi Yokoyama; Ken-ichi Inoue; Kiyotaka Ishibashi; Hirofumi Fukuyama
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Paper Abstract

A new styled compact wavelength dispersive X-ray spectrometer for light elements analysis has been developed. This spectrometer was applied for soft X-ray detection (energy less than 1 keV) mounted on a compact high-energy ion microprobe system `mikro-i' and combined with particle-induced X-ray emission in this system. Two multilayer monochrometers, W/Si multilayer and Ni/C multilayer, settled on the compact multilayer benders for X-ray diffraction, and a gas proportional counter with a wide (150 mm X 20 mm) and thin (1 micrometers thickness) polymer film window for soft X-ray made it possible to achieve the compact dimensions of the spectrometer. This system was evaluated for K lines emitted from light elements such as boron, carbon, nitrogen and oxygen. The energy resolution less than 21 eV for each element was observed and was enough to discriminate their characteristic X-rays from disturbing ones. Also, the sensitivity was enough to analyze trace elements or microarea.

Paper Details

Date Published: 25 September 1995
PDF: 10 pages
Proc. SPIE 2522, Electron-Beam Sources and Charged-Particle Optics, (25 September 1995); doi: 10.1117/12.221591
Show Author Affiliations
Yukito Furukawa, Kobe Steel, Ltd. (Japan)
Kazushi Yokoyama, Kobe Steel, Ltd. (Japan)
Ken-ichi Inoue, Kobe Steel, Ltd. (Japan)
Kiyotaka Ishibashi, Kobe Steel, Ltd. (Japan)
Hirofumi Fukuyama, Kobe Steel, Ltd. (Japan)

Published in SPIE Proceedings Vol. 2522:
Electron-Beam Sources and Charged-Particle Optics
Eric Munro; Henry P. Freund, Editor(s)

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