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Proceedings Paper

Retarding field optics with field-free sample
Author(s): Laurence S. Hordon; B. B. Boyer; Roger Fabian W. Pease
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Paper Abstract

Retarding field immersion lenses are coming into wide-spread use for focusing low energy electron and ion beams. One disadvantage is that any sample non-flatness will distort the focusing field. A more recent variant is a non-immersion retarding field lens, in which the sample is located outside the retarding field. We describe here a simple model and analysis which predicts that the performance of such a lens is competitive with the retarding immersion lens. With this lens design, it should be possible to focus a 1 keV electron beam with an energy spread of 1 eV into a spot of 4 nm diameter using realistic values of maximum voltage and retarding field strength. The effective resolution under these conditions is estimated to be 1.4 nm.

Paper Details

Date Published: 25 September 1995
PDF: 10 pages
Proc. SPIE 2522, Electron-Beam Sources and Charged-Particle Optics, (25 September 1995); doi: 10.1117/12.221588
Show Author Affiliations
Laurence S. Hordon, Stanford Univ. (United States)
B. B. Boyer, Stanford Univ. (United States)
Roger Fabian W. Pease, Stanford Univ. (United States)


Published in SPIE Proceedings Vol. 2522:
Electron-Beam Sources and Charged-Particle Optics
Eric Munro; Henry P. Freund, Editor(s)

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