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Proceedings Paper

Electrostatic lenses with corrected chromatic and spherical aberrations
Author(s): Lubov A. Baranova; Stella Y. Yavor; Eric Munro
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Paper Abstract

An electrostatic lens is proposed consisting of a set of cylindrical electrodes with gaps, where the axially symmetric, quadrupole and octopole components of the field are generated by a proper choice of electrode potentials. The conditions are found of correction of the chromatic and spherical aberrations in one direction.

Paper Details

Date Published: 25 September 1995
PDF: 4 pages
Proc. SPIE 2522, Electron-Beam Sources and Charged-Particle Optics, (25 September 1995); doi: 10.1117/12.221580
Show Author Affiliations
Lubov A. Baranova, A.F. Ioffe Physical-Technical Institute (Russia)
Stella Y. Yavor, A.F. Ioffe Physical-Technical Institute (Russia)
Eric Munro, Munro's Electron Beam Software Ltd. (United Kingdom)


Published in SPIE Proceedings Vol. 2522:
Electron-Beam Sources and Charged-Particle Optics
Eric Munro; Henry P. Freund, Editor(s)

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