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Proceedings Paper

Immersion lenses for low-voltage SEM and LEEM
Author(s): Katsushige Tsuno; Nobuo Handa; Sunao Matsumoto
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Paper Abstract

Spherical and chromatic aberration coefficients Cs and Cc of various immersion lenses for low voltage SEM and LEEM are calculated. The minimum values of magnetic immersion lens are Cs equals Cc equals 1 mm. For the combined electrostatic and magnetic lenses, those values are at most Cs equals 1 mm and Cc equals 0.7 mm, when the specimen is free from the electrostatic field. When the specimen is immersed in the electrostatic field, those values reduce to Cs equals 0.2 mm and Cc equals 0.1 mm at 1 kV.

Paper Details

Date Published: 25 September 1995
PDF: 10 pages
Proc. SPIE 2522, Electron-Beam Sources and Charged-Particle Optics, (25 September 1995); doi: 10.1117/12.221578
Show Author Affiliations
Katsushige Tsuno, JEOL Ltd. (Japan)
Nobuo Handa, JEOL Ltd. (Japan)
Sunao Matsumoto, JEOL Ltd. (Japan)


Published in SPIE Proceedings Vol. 2522:
Electron-Beam Sources and Charged-Particle Optics
Eric Munro; Henry P. Freund, Editor(s)

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