Share Email Print
cover

Proceedings Paper

Negative electron affinity photocathodes as high-performance electron sources. Part 1: achievement of ultrahigh brightness from an NEA photocathode
Author(s): Aaron W. Baum; William E. Spicer; Roger Fabian W. Pease; Kenneth A. Costello; Verle W. Aebi
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Brightness, energy spread and emission area are key parameters of electron sources for instruments such as electron microscopes and electron beam lithography tools. In developing transmission-mode NEA photocathodes as sources for these applications, these characteristics have been measured in specialized sealed tubes. Average lateral energies were measured at 63 meV for 1.5 micron thick photocathode, and 83 meV for a 0.5 micron thick photocathode, which was known to be emitting `hot' electrons. A current density of 841 A/cm2 was obtained from a 1.7 micron diameter emission area. This high current density can be explained in terms of lateral drift and diffusion of surface trapped electrons. Combined angular and current density data indicate a brightness of approximately 108 A/cm2-sr at 3 kV.

Paper Details

Date Published: 25 September 1995
PDF: 12 pages
Proc. SPIE 2522, Electron-Beam Sources and Charged-Particle Optics, (25 September 1995); doi: 10.1117/12.221575
Show Author Affiliations
Aaron W. Baum, Stanford Univ. (United States)
William E. Spicer, Stanford Univ. (United States)
Roger Fabian W. Pease, Stanford Univ. (United States)
Kenneth A. Costello, Intevac, Inc. (United States)
Verle W. Aebi, Intevac, Inc. (United States)


Published in SPIE Proceedings Vol. 2522:
Electron-Beam Sources and Charged-Particle Optics
Eric Munro; Henry P. Freund, Editor(s)

© SPIE. Terms of Use
Back to Top