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Proceedings Paper

Corner diffraction as an elementary act in binary optics
Author(s): Adolf W. Lohmann
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Paper Abstract

A two-dimensional lithographic structure is a typical object in binary optics. The diffraction on such objects can be decomposed into elementary processes at corners.

Paper Details

Date Published: 1 July 1990
PDF: 1 pages
Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); doi: 10.1117/12.22157
Show Author Affiliations
Adolf W. Lohmann, Univ. Erlangen Nurnberg (Germany)

Published in SPIE Proceedings Vol. 1319:
Optics in Complex Systems

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