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Proceedings Paper

Excimer-laser-induced chemical vapor deposition of boron nitride films from borazine
Author(s): M. V. Ugarov; Vladimir G. Ageev; Vitali I. Konov
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Paper Abstract

The excimer laser induced CVD of boron nitride films is reported. Basic dependencies of deposition rate on pulsed laser fluence, vapor pressure and substrate temperature are considered. Under optimum conditions h-BN film deposition rate of the order of 1 A per pulse was realized. Structure and composition of BN-films were characterized by AES and Raman spectroscopy. A simple deposition model is proposed taking into account chemisorption and partial decomposition of borazine molecules on the substrate surface between laser pulses and final decomposition of the intermediate product during the laser pulse.

Paper Details

Date Published: 25 September 1995
PDF: 7 pages
Proc. SPIE 2547, Laser Techniques for Surface Science II, (25 September 1995); doi: 10.1117/12.221488
Show Author Affiliations
M. V. Ugarov, General Physics Institute (Russia)
Vladimir G. Ageev, General Physics Institute (Russia)
Vitali I. Konov, General Physics Institute (Russia)


Published in SPIE Proceedings Vol. 2547:
Laser Techniques for Surface Science II
Janice M. Hicks; Wilson Ho; Hai-Lung Dai, Editor(s)

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