The Laser Displacement Sensor is designed according to the principle of laser triangulation. It is a precise geometric measurement sensor, and it is characterized by non-contact and high measuring efficiency. However, the measurement accuracy of the LDS is easily influenced by other factors, especially for free-form surfaces where the incidence angle has greater impact on measurement accuracy and the research is relatively less. The paper proposes a new error compensation strategy and the method of calculating incidence angle. It can effectively improve the measurement accuracy of free-form surfaces by inclination error compensation. The experiment verifies the correctness and reliability of the error model by using a Laser Interferometer. The result shows that the measurement accuracy is less than 10μm.

Date Published: 12 October 2015
PDF: 14 pages
Proc. SPIE 9633, Optifab 2015, 96332N (12 October 2015); doi: 10.1117/12.2214879

Published in SPIE Proceedings Vol. 9633:
Optifab 2015
Julie L. Bentley; Sebastian Stoebenau, Editor(s)