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Proceedings Paper

Pulsed UV laser applications for surface science: nanostructure fabrication to diamond deposition
Author(s): Hiroyuki Hiraoka; M. Sendova; C.-H. Lee; S. Latsch; T. M. Wong; Je-Kyung Sung; C.-T. Hung; T. Smith
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Paper Abstract

Pulsed UV lasers such as the 4th harmonic emission of Nd:YAG laser at 266 nm and ArF excimer laser at 193 nm have been used for surface modification of polymer surfaces, nano- structure fabrications on polymers and silicon substrates, and diamond deposition using photoablated polymer plumes. We report research carried out in our laboratory on these three topics.

Paper Details

Date Published: 25 September 1995
PDF: 7 pages
Proc. SPIE 2547, Laser Techniques for Surface Science II, (25 September 1995); doi: 10.1117/12.221480
Show Author Affiliations
Hiroyuki Hiraoka, Hong Kong Univ. of Science and Technology (Hong Kong China)
M. Sendova, Hong Kong Univ. of Science and Technology (Hong Kong China)
C.-H. Lee, Hong Kong Univ. of Science and Technology (Hong Kong China)
S. Latsch, Hong Kong Univ. of Science and Technology (Hong Kong China)
T. M. Wong, Hong Kong Univ. of Science and Technology (Hong Kong China)
Je-Kyung Sung, Hong Kong Univ. of Science and Technology (Hong Kong China)
C.-T. Hung, Hong Kong Univ. of Science and Technology (Hong Kong China)
T. Smith, Hong Kong Univ. of Science and Technology (Hong Kong China)


Published in SPIE Proceedings Vol. 2547:
Laser Techniques for Surface Science II
Janice M. Hicks; Wilson Ho; Hai-Lung Dai, Editor(s)

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