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Proceedings Paper

Electro-thermal MEMS fiber scanner for endoscopic optical coherence tomography (Conference Presentation)
Author(s): Hyeon-Cheol Park; Xiaoyang Zhang; Jessica Mavadia-Shukla; Wu Yuan; Huikai Xie; Xingde Li
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Paper Abstract

This work report an electro-thermal micro-electro-mechanical system (MEMS) fiber scanner for endoscopic optical coherence tomography (OCT) imaging. The electro-thermal MEMS actuator is composed of a micro-platform, a group of bimorph actuators and a substrate. At first, a 40 mm long bare fiber was fixed on the actuator while keeping the distal end tip free. The micro-platform was then, attached with the fiber at 20 mm apart from the fixed end. Electro-thermal bimorph MEMS actuator with large vertical displacement realizes 1-D forward optical scanning up to 3 mm of scanning range with only 5 VACp-p and 2 VDC operation voltages. The electro-thermal MEMS fiber scanner was combined with the high speed FDML-based swept-source OCT (SS-OCT) system and demonstrated its capability of performing cross-sectional imaging. The FDML laser source has a central wavelength of 1310 nm and a full wavelength sweeping range of ~ 150 nm, which provided an axial resolution of ~ 9.3 to 9.5 µm in air. The FDML sweeping frequency was 220 kHz, and the OCT imaging frame rate was synchronized with the resonant frequency of the MEMS fiber scanner (~88 frames per second). Due to the high actuation force of the electro-thermal actuation, proposed MEMS fibers canner can scan the fiber tip to a millimeter range with low actuation voltages and thus may have potential of performing raster scan with non-resonant fiber cantilevers directly.

Paper Details

Date Published:
PDF: 1 pages
Proc. SPIE 9697, Optical Coherence Tomography and Coherence Domain Optical Methods in Biomedicine XX, 96970O; doi: 10.1117/12.2214787
Show Author Affiliations
Hyeon-Cheol Park, Johns Hopkins Univ. (United States)
Xiaoyang Zhang, Univ. of Florida (United States)
Jessica Mavadia-Shukla, Johns Hopkins Univ. (United States)
Wu Yuan, Johns Hopkins Univ. (United States)
Huikai Xie, Univ. of Florida (United States)
Xingde Li, Johns Hopkins Univ. (United States)

Published in SPIE Proceedings Vol. 9697:
Optical Coherence Tomography and Coherence Domain Optical Methods in Biomedicine XX
Joseph A. Izatt; James G. Fujimoto; Valery V. Tuchin, Editor(s)

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