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Proceedings Paper

Effect of nonlinearity by polarization beam splitter in the double passage heterodyne interferometer
Author(s): Yarui Liu; Su'an Xu; Yaqiong Fu; Fei Qian; Feng Zhang
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Paper Abstract

Nonlinearity error in double passage heterodyne interferometer is mainly caused by the nonideal properties of optical components. To solve this problem, in this paper, the nonlinearity error caused by nonideal properties of polarization beam splitter(PBS) including transmission coefficient and azimuth is numerically analyzed, and then the mathematical model for nonlinearity error is established and simulated. The results show that the nonlinearity error of the displacement increases from 0.0153 nm to 2.2766 nm with the azimuthal error ranging from 1° to 12°, and the nonlinearity error caused by the transmissivity and reflectivity of PBS is minor and can be ignored. The research results provide a theoretical basis for the reduction of the nonlinearity error in the double passage heterodyne interferometer.

Paper Details

Date Published: 26 January 2016
PDF: 7 pages
Proc. SPIE 9903, Seventh International Symposium on Precision Mechanical Measurements, 99032A (26 January 2016); doi: 10.1117/12.2214616
Show Author Affiliations
Yarui Liu, China Jiliang Univ. (China)
Su'an Xu, China Jiliang Univ. (China)
Yaqiong Fu, China Jiliang Univ. (China)
Fei Qian, China Jiliang Univ. (China)
Feng Zhang, China Jiliang Univ. (China)


Published in SPIE Proceedings Vol. 9903:
Seventh International Symposium on Precision Mechanical Measurements
Liandong Yu, Editor(s)

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