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Proceedings Paper

VCSELs for interferometric readout of MEMS sensors
Author(s): Darwin K. Serkland; Kent M. Geib; Gregory M. Peake; Gordon A. Keeler; Michael J. Shaw; Michael S. Baker; Murat Okandan
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Paper Abstract

We report on the development of single-frequency VCSELs (vertical-cavity surface-emitting lasers) for sensing the position of a moving MEMS (micro-electro-mechanical system) object with resolution much less than 1nm. Position measurement is the basis of many different types of MEMS sensors, including accelerometers, gyroscopes, and pressure sensors. Typically, by switching from a traditional capacitive electronic readout to an interferometric optical readout, the resolution can be improved by an order of magnitude with a corresponding improvement in MEMS sensor performance. Because the VCSEL wavelength determines the scale of the position measurement, laser wavelength (frequency) stability is desirable. This paper discusses the impact of VCSEL amplitude and frequency noise on the position measurement.

Paper Details

Date Published: 18 March 2016
PDF: 8 pages
Proc. SPIE 9766, Vertical-Cavity Surface-Emitting Lasers XX, 976606 (18 March 2016); doi: 10.1117/12.2214522
Show Author Affiliations
Darwin K. Serkland, Sandia National Labs. (United States)
Kent M. Geib, Sandia National Labs. (United States)
Gregory M. Peake, Sandia National Labs. (United States)
Gordon A. Keeler, Sandia National Labs. (United States)
Michael J. Shaw, Sandia National Labs. (United States)
Michael S. Baker, Sandia National Labs. (United States)
Murat Okandan, Sandia National Labs. (United States)


Published in SPIE Proceedings Vol. 9766:
Vertical-Cavity Surface-Emitting Lasers XX
Kent D. Choquette; James K. Guenter, Editor(s)

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