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Proceedings Paper

Control and measuring system of a two-dimensional scanning nanopositioning stage based on LabVIEW
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Paper Abstract

A control and measuring system of two-dimensional nanopositioning stage is designed for the multiple selection and combinations control based on LabVIEW. The signal generator of the system can not only generate the commonly used control signals such as sine, square, triangle and sawtooth waves, but also generate special signals such as trapezoidal wave and step wave with DAQ data acquisition card. The step wave can be triggered by the other signals for the strict timing corresponding relation between X-Y control signals. Finally, the performance of the control system of two-dimensional nanopositioning stage is conducted by the heterodyne interferometer. The results show that the operation of the system is stable and reliable and the noise peak - valley value is superior to 2nm while the stage moving with 6nm step. The system can apply to the field requiring the precise control to the positioning stage in nano-measurement and metrology.

Paper Details

Date Published: 5 November 2015
PDF: 6 pages
Proc. SPIE 9795, Selected Papers of the Photoelectronic Technology Committee Conferences held June–July 2015, 979514 (5 November 2015); doi: 10.1117/12.2214428
Show Author Affiliations
Rui-Jun Zhang, Zhejiang Sci-Tech Univ. (China)
National Institute of Metrology (China)
Si-Tian Gao, National Institute of Metrology (China)
Wei Li, National Institute of Metrology (China)
Ben-Yong Chen, Zhejiang Sci-Tech Univ. (China)
Yu-Shu Shi, National Institute of Metrology (China)
Qi Li, National Institute of Metrology (China)


Published in SPIE Proceedings Vol. 9795:
Selected Papers of the Photoelectronic Technology Committee Conferences held June–July 2015
Shenggang Liu; Songlin Zhuang; Michael I. Petelin; Libin Xiang, Editor(s)

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