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Proceedings Paper

Response of piezoelectric laminated micro plates under the excitation of an ultrasonic wave
Author(s): Xin Kang; Shuai Dong
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Paper Abstract

This study presents the electromechanical response of a piezoelectric laminated micro plate under the excitation of an ultrasonic wave. The laminated plate consists of a piezoelectric layer (AlN), an elastic layer (SiO2) and two electrode layers (Au and Pt). Since the whole thickness of the plate is in micro scale, the size dependence of the dynamic behavior of the laminated plate is evaluated using the couple stress theory. The results show that the bending rigidity of the micro plate increases when the size effect is considered and the amplitudes of output of electric charge and voltage are reduced accordingly when the plate is excited by ultrasonic wave. Also the resonant frequency of the laminated plate increase because of the enhancement of the bending rigidity of the plate. The analysis results can provide a reference for the design of micromachined piezoelectric sensors.

Paper Details

Date Published: 26 January 2016
PDF: 7 pages
Proc. SPIE 9903, Seventh International Symposium on Precision Mechanical Measurements, 99031U (26 January 2016); doi: 10.1117/12.2214138
Show Author Affiliations
Xin Kang, Putian Univ. (China)
Shuai Dong, Nanjing Univ. of Science and Technology (China)
Southeast Univ. (China)


Published in SPIE Proceedings Vol. 9903:
Seventh International Symposium on Precision Mechanical Measurements
Liandong Yu, Editor(s)

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