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Proceedings Paper

Femtosecond laser processing of transparent materials for assembly-free fabrication of photonic microsensors
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Paper Abstract

In this paper, we summarize our recent research progresses on the understanding, design, fabrication, characterization of various photonic sensors for energy, defense, environmental, biomedical and industry applications. Femtosecond laser processing/ablation of various glass materials (fused silica, doped silica, sapphire, etc.) will be discussed towards the goal of one-step fabrication of novel photonic sensors and new enabling photonic devices. A number of new photonic devices and sensors will be presented.

Paper Details

Date Published: 14 March 2016
PDF: 8 pages
Proc. SPIE 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI, 97351C (14 March 2016); doi: 10.1117/12.2213883
Show Author Affiliations
Lei Yuan, Clemson Univ. (United States)
Yinan Zhang, Missouri Univ. of Science and Technology (United States)
Jie Huang, Missouri Univ. of Science and Technology (United States)
Jie Liu, Clemson Univ. (United States)
Yang Song, Clemson Univ. (United States)
Qi Zhang, Clemson Univ. (United States)
Jincheng Lei, Clemson Univ. (United States)
Hai Xiao, Clemson Univ. (United States)


Published in SPIE Proceedings Vol. 9735:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI
Beat Neuenschwander; Stephan Roth; Costas P. Grigoropoulos; Tetsuya Makimura, Editor(s)

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