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Proceedings Paper

Low-cost facile interferometer for displacement mapping of harmonically excited MEMS
Author(s): Mateusz Mądzik; Jaime Viegas
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Paper Abstract

In this work, we present a simple, assembled from readily available components, low cost, imaging vibrometer based on a Twyman-Green interferometer with digital interferogram acquisition, allowing to map displacement contour levels of a harmonically excited piezoelectric membrane, on the principle of exposure integration. We experimentally demonstrate the capabilities of our setup on imaging the 4th mechanical mode of vibration of a 200 micrometer radius piezoelectric micromachined ultrasonic transducer membrane vibrating at 842 kHz, with an out-of-plane amplitude of 475 nm. Our results allow a direct visualization of the influence of etching trenches onto the vibrating membrane, in excellent agreement with FEM simulations.

Paper Details

Date Published: 16 March 2016
PDF: 6 pages
Proc. SPIE 9754, Photonic Instrumentation Engineering III, 975404 (16 March 2016); doi: 10.1117/12.2213822
Show Author Affiliations
Mateusz Mądzik, Masdar Institute of Science & Technology (United Arab Emirates)
Jaime Viegas, Masdar Institute of Science & Technology (United Arab Emirates)


Published in SPIE Proceedings Vol. 9754:
Photonic Instrumentation Engineering III
Yakov G. Soskind; Craig Olson, Editor(s)

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