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Proceedings Paper

A cantilever based optical fiber acoustic sensor fabricated by femtosecond laser micromachining
Author(s): Jie Liu; Lei Yuan; Jie Huang; Hai Xiao
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Paper Abstract

In this paper, we present a pure silica micro-cantilever based optical fiber sensor for acoustic wave detection. The cantilever is directly fabricated by fs laser micromachining on an optical fiber tip functioning as an inline Fabry-Perot interferometer (FPI). The applied acoustic wave pressurizes the micro-cantilever beam and the corresponding dynamic signals can be probed by the FPI. The thickness, length, and width of the micro-cantilever beam can be flexibly designed and fabricated so that the sensitivity, frequency response, and the total measurement range can be varied to fit many practical applications. Experimental results will be presented and analyzed. Due to the assembly free fabrication of the fs-laser, multiple micro-cantilever beams could be potentially fabricated in/on a single optical fiber for quasi-distributed acoustic mapping with high spatial resolution.

Paper Details

Date Published: 6 April 2016
PDF: 7 pages
Proc. SPIE 9738, Laser 3D Manufacturing III, 973804 (6 April 2016); doi: 10.1117/12.2213614
Show Author Affiliations
Jie Liu, Clemson Univ. (United States)
Lei Yuan, Clemson Univ. (United States)
Jie Huang, Clemson Univ. (United States)
Hai Xiao, Clemson Univ. (United States)

Published in SPIE Proceedings Vol. 9738:
Laser 3D Manufacturing III
Bo Gu; Henry Helvajian; Alberto Piqué, Editor(s)

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