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Proceedings Paper

High-speed and high-resolution heterodyne interferometer
Author(s): Shuko Yokoyama; I. Nishihara; A. Okamoto; Tsutomu Araki; Norihito Suzuki
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Paper Details

Date Published: 1 July 1990
PDF: 2 pages
Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); doi: 10.1117/12.22135
Show Author Affiliations
Shuko Yokoyama, IDEC Izumi Co. (Japan)
I. Nishihara, IDEC Izumi Co. (Japan)
A. Okamoto, IDEC Izumi Co. (Japan)
Tsutomu Araki, Univ. of Tokushima (Japan)
Norihito Suzuki, Osaka Electro Communication Univ. (Japan)


Published in SPIE Proceedings Vol. 1319:
Optics in Complex Systems

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